AMAT 0190-09379｜OEM Spare Part｜

AMAT 0190-09379 – Spare Part Overview

1. Adaptation to Device Types

The AMAT 0190-09379 spare part is designed for semiconductor manufacturing equipment that requires high-precision electrical signal control. Typical application scenarios include:

• Thin Film Deposition Equipment

  • PVD (Physical Vapor Deposition): for metal wiring.

  • ALD (Atomic Layer Deposition): for ultra-thin, high-precision film layers.

  • In these systems, the 0190-09379 typically functions as a power module driver interface or heating unit current control component, ensuring stable temperature and power delivery. This directly affects thin film purity and thickness uniformity.

• Ion Implantation Equipment

  • Used in wafer doping processes to form PN junctions.

  • The 0190-09379 may act as an ion beam current regulation signal interface, stabilizing beam current and preventing doping concentration deviations.

• Cleaning Equipment

  • Applied in wafer surface preparation and impurity removal.

  • Here, the 0190-09379 may serve as a cleaning fluid flow control electrical element, helping maintain consistent cleaning performance across wafers.

2. Core Functions (Based on Series Characteristics & Industry Applications)

Since AMAT’s original spare part details are only available to end-users with equipment documentation, the 0190 series is typically characterized by two main functions:

• Accurate Electrical Signal Transmission & Conversion

  • Ensures low-interference transmission between the main control unit (e.g., PLC) and executing components (e.g., heating elements, fluid valves, sensors).

  • Provides voltage/current conversion, such as transforming low-voltage control signals into the high-voltage drive signals required by actuators.

• Power Drive & Protection Assistance

  • Delivers stable drive signals for high-power equipment modules (e.g., heating units, vacuum pumps).

  • Implements built-in protection logic (e.g., overcurrent, overvoltage protection) to safeguard critical components from electrical anomalies.