AMAT 0100-09299｜OEM Spare Part｜

AMAT 0100-09299 – Spare Part Overview

1. Adaptation to Device Types

The AMAT 0100-09299 spare part is a customized electrical connection and signal interface component, widely applied in semiconductor equipment requiring high reliability of electrical connections and low interference in weak signal transmission.

Typical adaptation scenarios include:

• Etching Equipment

  • Example: plasma etching machines for wafer patterning.

  • Function: acts as a connection interface between the RF module and the main control unit, or as a sensor signal terminal for chamber pressure/temperature feedback.

  • Purpose: ensures stable RF power signal delivery and precise sensor data transmission to avoid etching pattern deviations.

• Thin Film Deposition Equipment

  • Examples: PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition).

  • Function: may serve as a low-voltage connection between heating units and temperature controllers or as a gas valve control signal interface.

  • Purpose: provides stable transmission for deposition temperature and process gas flow control.

• Cleaning Equipment

  • Example: wet cleaning systems for wafer surface impurity removal.

  • Function: serves as an electrical terminal for cleaning solution spray systems or as a signal interface for liquid level sensors.

  • Purpose: ensures stable cleaning parameter control, avoiding process instability due to connection looseness.

2. Core Functions (Based on Series Commonalities & Industry Feedback)

The AMAT 0100 series spare parts are typically positioned for signal and power interconnection within equipment subsystems. For the 0100-09299, its functions can be summarized as:

• High-Precision Electrical Connection

  • Provides robust physical interfaces between device sub-modules (e.g., control boards ↔ actuators, sensors ↔ acquisition boards).

  • Features low contact resistance and anti-loosening design, minimizing voltage drop or current loss caused by unstable connections.

• Low-Interference Signal Transmission

  • Designed to handle weak sensor signals (temperature, pressure, flow, etc.) that are sensitive to noise.

  • Utilizes shielded material selection and optimized connector structures to reduce electromagnetic interference (EMI).

  • Ensures accuracy and stability of process parameter acquisition in harsh semiconductor environments.