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ZYGO ZMI-2002 8020-0211-1-J｜Laser System Measurement Board Card｜
Core parameters
Number of measurement axes: Dual axis (synchronous independent measurement)
Resolution:<1 nm, accuracy ± 0.1 μ m
Size/Weight: 6U VME (229 × 114 × 29 mm), approximately 1.2 kg
Interface: VME, ISA, Simplified P2 (up to 7.7 MHz)
Power/Temperature: 5V ± 5%; 0°C～+40°C
Key Features
Interference measurement technology: nanometer level accuracy, low noise, high stability.
Simplify P2 bus: cascading multiple boards to save backplane slots and adapt to servo/motion controllers.
Programmable control: VME/ISA/P2 interfaces are programmable and support multi axis expansion (up to 16 axes).
Typical Applications
Semiconductor: precise positioning and flatness measurement of wafers/masks.
Optical manufacturing: Inspection of lens/reflector morphology, contour, and flatness.
Precision Machinery: Nanoscale Displacement Feedback and Calibration for Machine Tools/Robots.
ZYGO ZMI-2002 8020-0211-1-J｜Interferometer lens｜
By structuring the information in this manner, the article provides a clear and organized understanding of input channels, transducer supply, and communication implementations in distributed control systems.
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