AMAT 0100-35231｜APPLIED MATERIALS｜

AMAT 0100-35231 – Spare Part Overview

1. High Cleanliness Requirements

• Designed for semiconductor-grade environments, meeting Class 1 or higher cleanliness standards.

• Ensures surface is free from particles, fibers, or metallic impurities, preventing wafer contamination.

• Use of non-original or non-cleanroom-compliant substitutes may lead to:

  • Yield reduction,

  • Process chamber contamination,

  • Complete process failure.

2. Model Uniqueness and Compatibility

• AMAT spare part codes are strictly unique.

  • For example, 0100-35231 (without a suffix) typically represents the baseline universal version.

• Compatibility must be confirmed with:

  • Specific equipment models (e.g., Endura RTP, Centura DPS).

  • Equipment batch and chamber design.

• Even visually similar parts may not be interchangeable due to:

  • Differences in interface dimensions,

  • Material selection (corrosion-resistant alloys, fluoropolymers),

  • Process-specific tolerances.

• Prior to replacement, the part’s compatibility must be validated in the AMAT equipment compatibility database.

3. Material and Process Adaptation

• When applied in special gas environments (corrosive, flammable, or explosive gases):

  • Materials must be corrosion-resistant (e.g., Hastelloy, PTFE).

  • Sealing structures must ensure gas-tight integrity.

• Every spare part undergoes AMAT gas compatibility certification to guarantee safety.

• Unauthorized replacement with different materials may result in:

  • Gas leaks,

  • Accelerated equipment corrosion,

  • Safety hazards during operation.